CHINESE JOURNAL OF ENERGETIC MATERIALS
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集成PN结防护结构的薄膜换能芯片
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1.杭州电子科技大学微电子研究院1;2.陕西应用物理化学研究所 应用物理化学国家级重点实验室, 陕西 西安 710061

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Thin Film Transducer Chip with an Integrated PN Junction Protective Structure
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1.Micro-Electronics Research Institute, Hangzhou Dianzi University,Hangzhou 310018, China;2.I National Key Laboratory of Applied Physics and Chemistry, Shaanxi Applied Physics and Chemistry Research Institute, Xi′an 710061 China

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    摘要:

    研究设计了一种平面纵向集成PN结(半导体的空间电荷区)结构二极管的薄膜换能元芯片,并制作了3 Ω和4 Ω 2种桥区电阻, 每种电阻制备1.0 mm×1.0 mm、1.5 mm×1.5 mm、2.0 mm×4.0 mm 3种芯片尺寸,每种尺寸设计8,18,28,34 V 4种击穿电压的集成芯片样品,其中1.0 mm芯片对应4种击穿电压的芯片,1.5 mm、2.0 mm芯片对应34V击穿电压进行静电对比试验。为研究集成防护结构对换能元的爆发性能的影响,对3 Ω的1.0 mm集成芯片进行了发火试验测试。结果表明集成薄膜芯片尺寸越大,抗静电能力增强;芯片桥区电阻越大,越容易受到静电干扰损伤,其静电防护性能达500 pF/500 Ω/25 kV。PN结结构的击穿电压越小,其旁路电流的能力越大,对换能元爆发性能的影响越大,击穿电压越大,对换能元的静电防护作用越小。对于33 μF/16 V作用条件的火工品,选择18 V击穿电压的集成芯片说明集成薄膜芯片应用中需要根据换能元的工作电压选用合适的击穿电压,以保证集成芯片既可以防护静电干扰,不影响产品的正常作用。

    Abstract:

    The planar thin film transducer chip was designed with longitudinally integrated PN junction structure diode, and integrated through microelectronics technology for excellent security performance and high integration characteristics. Each of three different-sized chips with 1.0 mm×1.0 mm,1.5 mm×1.5 mm and 2.0 mm×4.0 mm, were designed under four breakdown voltages of 8, 18, 28, 34 V, and two kinds of resistance ,3 Ω and 4 Ω. The ignition tests were carried out on the integrated chip to study the impact of the integrated structure on the burst performance of the transducer. Results from the static electricity of these chips show that the larger the size of the integrated thin film chip is, the stronger the antistatic ability, the greater the resistance in the bridge area of the chip, and the more vulnerable to electrostatic interference are. The electrostatic protection performance of designed chip can reach 500 pF/500 Ω/25 kV. The smaller the breakdown voltage is, the greater the bypass current capacity, the greater the impact on the burst performance of the transducer, and the greater the breakdown voltage, but the smaller the electrostatic protection effect are on the energy converter. For initiating explosive devices to be ignited under 33 μF/16 V, the integrated chip with an 18V breakdown voltage should be selected. Therefore, when the integrated thin film chip is applied, it is necessary to select an appropriate breakdown voltage according to the working voltage of the transducer for both a protection against static interference and a necessary avoidance in failure of its normal function.

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引用本文

李慧,骆建军,任炜,等.集成PN结防护结构的薄膜换能芯片[J].含能材料, 2023, 31(3):222-228. DOI:10.11943/CJEM2022278.
LI Hui, LUO Jian-jun, REN Wei, et al. Thin Film Transducer Chip with an Integrated PN Junction Protective Structure[J]. Chinese Journal of Energetic Materials, 2023, 31(3):222-228. DOI:10.11943/CJEM2022278.

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  • 收稿日期: 2022-11-17
  • 最后修改日期: 2023-03-09
  • 录用日期: 2023-02-23
  • 在线发布日期: 2023-03-01
  • 出版日期: 2023-03-25