Based on the comprehensive analysis of literatures about energetic thin films, it is concluded that the technology and process of preparation for metal-composite energetic film, energetic semiconductor bridge(SCB) and nano-porous silicon/oxidant composite films are compatible with one of preparation on the micro-electro-mechanical systems(MEMS) devices. In addition, through representation about the methods of fabrication and energy output characteristic on three kinds of energetic thin films mentioned above, it is considered that initiating explosive device for MEMS can unfold a critical way for development of technology on initiators and pyrotechnics.