CHINESE JOURNAL OF ENERGETIC MATERIALS
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(B/Ti)n/TaN薄膜点火桥的制备及点火性能
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(电子科技大学 电子薄膜与集成器件国家重点实验室, 四川 成都 610054)

作者简介:

蔡贤耀(1988-),男,硕士研究生,主要从事火工品技术及含能材料研究。e-mail: xiaoxiandi86@gmail.com 通信联系人: 蒋洪川(1971-),男,教授,主要从事电子薄膜材料与器件研究。e-mail: hcjiang@uestc.edu.cn

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国防预研基金资助(9140A12040412DZ02138)


Fabrication and Performances of (B/Ti)n/TaN Thin-film Initiator Bridge
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(State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China,Chengdu 610054, China)

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    摘要:

    利用磁控溅射与微细加工技术, 将B/Ti多层膜沉积在TaN模桥制备了(B/Ti)n/TaN薄膜点火桥(膜桥), 其中TaN膜桥的尺寸为80 μm×40 μm×2 μm, B/Ti多层膜尺寸为4 mm×4 mm, 层数为40层, 第一层B厚度400 nm, 其后每层B或Ti厚度为200 nm, 总厚度约8 μm。用电压40 V、电容47 μF的钽电容对样品进行发火性能测试。结果表明:TaN膜桥的点火延迟时间为85 μs、点火输入能量15 mJ、爆炸温度2500~3500 K、火焰持续时间0.15 ms左右、炸药持续高度5 mm左右, 而(B/Ti)n/TaN膜桥的点火延迟时间为37 μs、点火输入能量6 mJ、爆炸温度4000~8500 K、火焰持续时间大于0.25 ms、火焰持续高度10 mm以上。在点火桥上沉积B/Ti多层膜可降低点火延迟时间和点火输入能量, 有效提升火工品的点火性能。

    Abstract:

    By using magnetron sputtering and micro-manufacturing technology, the(B/Ti)n/TaN thin-film initiator bridge was fabricated, with the 40 layers B/Ti multi-layers(4 mm×4 mm) deposited on TaN thin-film 80 μm×40 μm×2 μm initiator bridge contained 40 layers of B and Ti, where the first layer was 40 nm thickness B, and others were 200 nm B or Ti.The ignition performances of the samples were tested by a 47 μF tantalum capacitor with voltage of 40 V.Results show that the ignition delay time, input ignition energy, explosion temperature, duration time and height of flame for TaN thin-film initiator bridge are 85 μs, 15 mJ, 2500-3500 K, 0.15 ms, 5 mm, while, for(B/Ti)n/TaN thin-film initiator bridge, they are 37 μs, 6 mJ, 4000-8500 K, 0.25 ms, 10 mm, respectively.It is found that the introduction of B/Ti multi-layers can decrease the ignition delay time and input ignition energy, improve the ignition performances of TaN thin-film initiator bridge.

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蔡贤耀,蒋洪川,闫裔超,等.(B/Ti)n/TaN薄膜点火桥的制备及点火性能[J].含能材料, 2015, 23(3):265-269. DOI:10.11943/j. issn.1006-9941.2015.03.012.
CAI Xian-yao, JIANG Hong-chuan, YAN Yi-chao, et al. Fabrication and Performances of (B/Ti)n/TaN Thin-film Initiator Bridge[J]. Chinese Journal of Energetic Materials, 2015, 23(3):265-269. DOI:10.11943/j. issn.1006-9941.2015.03.012.

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  • 收稿日期: 2014-03-11
  • 最后修改日期: 2014-05-05
  • 录用日期: 2014-05-23
  • 在线发布日期: 2015-03-09
  • 出版日期: 2015-03-10