CHINESE JOURNAL OF ENERGETIC MATERIALS
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基于Al/CuOx复合薄膜半导体桥间隙点火性能研究
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陕西应用物理化学研究所

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中国博士后基金 2015M572610中国博士后基金(2015M572610)


The Gap Ignition Performances of Semiconductor Bridge Based on Al/CuOx Multilayer Films
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Shanxi Applied Physics and Chemistry Research Institute, Xi′an 710061, China

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    摘要:

    为了提升半导体桥(SCB)的点火能力,尤其是点燃钝感药剂的能力,采用磁控溅射技术将Al/CuOx复合薄膜与半导体桥相融合,形成含能点火器件,并研究了该含能点火器件的发火感度和点火能力。采用扫描电子显微镜(SEM)、X-射线能谱仪(EDS)、X-射线衍射仪(XRD)研究了Al/CuOx复合薄膜的微观形貌和组成。结果表明,在溅射过程中氧化铜薄膜主要以黑铜矿(Cu21+ Cu21+O3)形式存在;复合薄膜中Al、Cu、O三种元素质量分数分别为28.8%,32.5%和38.7%,且Al与Cu原子比例接近于理论比1∶1;差示扫描量热仪(DSC)显示Al/CuOx复合薄膜放热量约为2175.4 J·g-1;高速摄影技术测试Al/CuOx复合薄膜的燃烧速率约为3.0 m·s-1;兰利法测得该含能点火器件50%发火电压为8.45 V,99.9%发火电压为12.39 V。点火能力实验表明,在点火间隙为4 mm时,该含能器件能够点燃钝感点火药硼-硝酸钾(B/KNO3)药片,显著提升了半导体桥的点火能力。

    Abstract:

    To improve the ignition ability of semiconductor bridge (SCB), especially the ability to ignite insensitive compositions, Al/CuOx multilayer film was fused and combined with semiconductor bridge by magnetron sputtering technology to form an energetic ignition device and the ignition sensitivity and ignition ability of the energetic ignition device were studied. The micro morphology and composition of Al/CuOx multilayer films were studied by scanning electron microscopy (SEM), X-ray energy dispersive spectrometer (EDS) and X-ray diffractometer (XRD). Results show that the copper oxide film mainly exists in the form of black copper ore (Cu21+ Cu21+O3); the mass fractions of Al, Cu and O in the multilayer film are 28.8%, 32.5% and 38.7% respectively, and the ratio of Al to Cu atom is close to the theoretical ratio of 1∶1; the results obtained by differential scanning calorimeter(DSC) show that the quantity of heat release of Al/CuOx multilayer film is about 2175.4 J·g-1. The burning rate of Al/CuOx multilayer film is measured by high-speed photography is about 3.0 m·s-1. The 50% ignition voltage of the energetic ignition device measured by Lanley′s method is 8.45 V and 99.9% ignition voltage is 12.39 V. The ignition ability experiment shows that when the ignition gap is 4 mm, the energetic device can ignite the insensitive ignition composition of B/KNO3 tablets, which significantly improves the ignition ability of the semiconductor bridge.

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倪德彬,于国强,史胜楠,等.基于Al/CuOx复合薄膜半导体桥间隙点火性能研究[J].含能材料, 2019, 27(2):149-154. DOI:10.11943/CJEM2018167.
NI De-bin, YU Guo-qiang, SHI Sheng-nan, et al. The Gap Ignition Performances of Semiconductor Bridge Based on Al/CuOx Multilayer Films[J]. Chinese Journal of Energetic Materials, 2019, 27(2):149-154. DOI:10.11943/CJEM2018167.

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  • 收稿日期: 2018-06-25
  • 最后修改日期: 2019-01-02
  • 录用日期: 2018-09-26
  • 在线发布日期: 2018-12-05
  • 出版日期: 2019-02-25